美國(guó)博曼（BOWMAN）X熒光測(cè)厚儀原理

關(guān)于美國(guó)博曼（BOWMAN）X熒光鍍層測(cè)厚儀原理：

對(duì)被測(cè)樣品發(fā)射一次X射線，樣品的原子吸收X射線的能量后被激發(fā)并釋放出二次X射線。通過(guò)測(cè)量被釋放出的二次X射線的特征能量和強(qiáng)度，就能夠?qū)?/span>被測(cè)樣品的鍍層厚度和成份進(jìn)行定性和定量分析。

X熒光新技術(shù)

• Different types of detectors

?Improved resolution

?Improved stability

?Prolonged life

• Various X-ray tube targets

?Optimized for challenging applications

?Cr, Mo, W, Rh, etc.

•X-ray optics

?Poly capillary optics

?Halo reduction optics

• Modular design

?Miniaturized components

?Low component cost

?Better serviceability

檢測(cè)器的發(fā)展

正比計(jì)數(shù)器 

• Xe, Ne, or other halogen gas filled

• Drift with temperature or/and humidity change

• 10,000~30,000 cps

• 800~1200eV at Mnresolution

• Shorter life (2~5 years)

PIN 檢測(cè)器

• Thermoelectrically cooled (Peltier)

• Be window

• Count rates: 3000~50,000 cps

• Resolution: 170~240eV at Mn K a

• 10+ years life

硅漂移檢測(cè)（SDD）

• Thermoelectrically cooled (Peltier)

• Be window or Carbon based material

• Light element capability (i.e. P, Si, Al)

• Count rates: 10,000~1,000,000 cps

• Resolution: 120~170eV at Mn K a• 10+ years life

固態(tài)檢測(cè)器的優(yōu)點(diǎn)

• Phosphorus analysis electroless Ni

• Improved detection ldown to Angstrom olevel

• Separation of overlaelements

• Improved stability wiminimal drift

• Less maintenance1um Au/5um Ni/Inf Cu